5. Metrology
5.1 Optical Inspection
- Olympus SZ-ET stereo zoom microscope 2-18X by 20X with digital image capture
- Nikon Optiphot 88 microscope (5, 10, 40,60,100x) w/ 5 Megapixel digital camera and monitor, linewidth measurement, image capture, Nomarski, Bright Field/Dark Field, front/backside illumination
- Nikon Optiphot microscope (5, 20, 40, 60x)
- Nikon V12A Profile Projector/Comparator
5.2 Film Thickness Measurement
- Nanometrics NanoSpec 3000
- Film thickness monitor for oxide, nitride and polysilicon
- Tencor P-20 Profilometer
- submicron film thickness/surface roughness measurements, long scan length (up to 6" wafers)
- Tencor P-10 Profilometer
- submicron film thickness/surface roughness measurements
- Allied High-Tech digital dial indicator measurement system (1 um resolution)
- Woollam VASE Spectroscopic Ellipsometer
- Auto-angle with autocompensator, automated x-y stage, spectral range 195nm - 1700nm, vertical sample mounting.
- Gaertner Ellipsometer
- Digital Instruments AFM DImension 3000
- 100x100x2 micron scan field with tapping, contact, STM, MFM, nanoMAN modes.
- Zygo optical profilometer
- Non-contact optical profilometer
5.3 Film Stress Measurement
5.4 Calibration Standards
- Tencor 1000 Angstrom film thickness standard with linewidth/pitch standards (5, 10, 20 Micron)
- Dektak 1000 Angstrom film thickness standard
- Mass/weight standards set 0.01 g to 100 g