4. Furnaces and LPCVD
4.1 Oxidation, Doping, and Annealing Furnaces
- Canary Furnace Stack
- Wet/dry oxide, boron diffusion
- Lindberg Diffusitron Mark IV heavy duty
- Wet/dry oxide, boron diffusion, phosphorous diffusion, annealing
- Lindberg 4" tube furnaces (3x)
4.2 LPCVD
- Canary furnace stack
- amorphous silicon, polysilicon, silicon nitride
- LPCVD SiC
- Silicon carbide
- Gases: SiH4, H2, C3H8, Ar
- SCS PDS 2010 Parylene Coater