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Lab Description
Utah's micro and nano science and engineering laboratories are interdisciplinary facilities supporting innovative education, research, and technology transfer. Located at the University of Utah, these multi-purpose facilities provide the clean environment, expertise, and equipment necessary for micromachining, microfabrication, and nano-scale semi-conductor materials& device research.
The teaching laboratories strengthen undergraduate microfabrication curricula and train graduate students from across the University of Utah campus in the fundamentals of micromachining, microsystems design and characterization, microsensors and actuators, and microelectronic devices.
The research laboratories offer an extensive array of process equipment with advanced capabilities in pattern generation, photolithography, thin film deposition and etch. Characterization capabilities include surface analysis and nano-imaging. Researchers from the School of Medicine and Colleges of Engineering, Science, Pharmacy, and Mines collaborate in research and development of biological and chemical sensing micro arrays based on nanotechnology. Researchers are developing micro electro-mechanical systems (MEMS) including neuroprosthetics, devices and optical microfluidic functions, harsh environment sensors, and micro power sources such as fuel cells and solar cells.
These laboratories support the University of Utah mission to stimulate and grow the economy in the State of Utah by innovating and transferring developed technologies into the private sector. The labs support and enable many industry and university collaborations.
Lab Fee Budget Justification
The Utah Nanofabrication Laboratories have mandatory fees associated with access to the labs. Fees are assessed per user based on entry into the lab and use of equipment.
The following rates are applicable for use of the laboratories:
Rates as of October 2008:
| Maximum Monthly Lab Entry Fee | $535/month |
| Hrly Lab Entry Fee (to monthly max) | $45/hour |
| Mask Making Fee | $35/layer |
| Professional Tech Support | $55/hour |
| Basic Lab Entry Fee | $15/hour |
| XPS, SEM, XRF, FIB | $45/hour |
| Professional Tech Support | $55/hour |
| Student Tech Support | $20/hour |
| Consumables, Precious Metals & Gases | Billed as used |
| Reservation Fee (waived if equipment used) | $25 |
| Failure to card-out Fee | 2 hour minimum |
Funds are requested for student use of the Utah Nanofabrication laboratories.
Funds for (X) students are requested for (X) hours within the Microfab lab, for a total of (X) dollars per year.
Funds for (X) students are requested for (X) hours within the Surface Anaylisis & nano Imaging Lab, for a total of (X) dollars per year.
Consumables will be used at an estimated amount of (X) dollars per student per year, for a total of (X) dollars per year.