Lab Description

Utah's micro and nano science and engineering laboratories are interdisciplinary facilities supporting innovative education, research, and technology transfer.  Located at the University of Utah, these multi-purpose facilities provide the clean environment, expertise, and equipment necessary for micromachining, microfabrication, and nano-scale semi-conductor materials& device research.

 

The teaching laboratories strengthen undergraduate microfabrication curricula and train graduate students from across the University of Utah campus in the fundamentals of micromachining, microsystems design and characterization, microsensors and actuators, and microelectronic devices.

 

The research laboratories offer an extensive array of process equipment with advanced capabilities in pattern generation, photolithography, thin film deposition and etch.  Characterization capabilities include surface analysis and nano-imaging.  Researchers from the School of Medicine and Colleges of Engineering, Science, Pharmacy, and Mines collaborate in research and development of biological and chemical sensing micro arrays based on nanotechnology.  Researchers are developing micro electro-mechanical systems (MEMS) including neuroprosthetics, devices and optical microfluidic functions, harsh environment sensors, and micro power sources such as fuel cells and solar cells.

 

These laboratories support the University of Utah mission to stimulate and grow the economy in the State of Utah by innovating and transferring developed technologies into the private sector.  The labs support and enable many industry and university collaborations.