Laboratory Layout and Evacuation Map

 


 

Rules and Usage Procedures


The following information provides guidelines for working in the Microfab Lab. All course students, researchers, staff, and faculty must read and understand these rules and procedures to use the Microfabrication Lab. 


Requirements to Access the Microfab Lab

  1. You must complete safety training and pass the safety test.
  2. To conduct research in the lab, you must establish an account for your principal investigator (faculty advisor) or company.
  3. Mechanical room and service chase access is limited to Microfab staff and personnel authorized by them.
  4. General access to the lab is available Monday - Friday from 8am - 5pm. For safety reasons, you must not work alone outside of general lab hours. Use of the buddy system is madatory during these times.
  5. Food, drink, and personal items are prohibited in the Lab.
  6. Only use equipment that you are trained and authorized to use.
    1. Training time by Microfab staff is billed at the standard lab rates.
    2. Standard Operating Procedures (SOPs) are available for most major tools.

"Buddy" System

  1. A buddy refers to having another person present while working in the lab that is capable of helping in the event of an emergency.
  2. The University of Utah College of Engineering mandates that researchers working in labs containing hazards must not work alone.
  3. The Microfabrication Lab Buddy System Policy:
    1. Trained and Authorized lab users can work in the lab outside of general access hours (8am - 5pm M-F) if at least one other person capable of helping in an emergency is present in the lab.
    2. Trained users are individuals who have received training either directly from or approved through lab staff, for the specific tools to be used, and for a level appropriate to the access granted.
    3. Authorized users have created a billing account, received safety training, passed the safety test, and agreed to comply with laboratory policies.
  4. Three Access Levels for the lab
    1. Course lab section students - Mon. to Fri. from 7am to 6pm
    2. Student researchers - Mon. to Fri. 24 hour access
    3. Student researchers with additional training to identify, fix, or correctly respond to emergency situations - Mon. to Sun. 24 hour access.
  5. A website to facilitate coordination between researchers outside of general access hours (a "Buddy" board) is under development.
  6. Users violating the buddy system rules will be subject to disciplinary action by the Microfab Staff, College of Engineering, and/or University of Utah.

Equipment Reservations, Usage, and Billing

  1. The Microfabrication Lab operates as a recharge center, and is open to academic and industrial users. Lab usage fees are either paid through course fees for classes or a research account. Contact Monica Heaton for billing questions or to setup a new account.
  2. Reservations are made in the "EQUIPMENT RESERVATION LOG" prior to use.
  3. Fully complete the requested information in the reservation log.
  4. Users are not billed for reserved time if the equipment is unavailable.
  5. At least 2 hours advance notice is required to cancel or reschedule an equipment reservation and avoid being charged for the scheduled time.
  6. Equipment usage is billed per hour per individual on a monthly basis.
  7. Equipment usage must be logged in the "MONTHLY INDIVIDUAL ACTIVITY RECORD."
  8. Questions regarding equipment availability and billing should be addressed to Microfab staff.

Laboratory Etiquette

  1. Laboratory cleanliness is ESSENTIAL to the safe and successful operation of Microfabrication Lab.
    1. You MUST clean up any mess made and supplies used during lab sections and/or research activities. This includes items such as chemicals, glassware, hot plate surfaces, spinners, wet benches, etc. Violations will result in disciplinary action!
    2. Improperly labeled chemicals left out will be disposed of immediately. If the composition is "unknown", then it will have to be analyzed and disposed of by EH&S. Any charges will added to your lab fees.
    3. If you have a mess that is difficult or dangerous to clean, ask a Microfab staff person for advice and/or assistance.
  2. Do not bring chemicals into or remove chemicals from the Microfab lab without permission from lab staff.
  3. Clearly identify any experiments you are not directly attending with your name, email address, phone number, and beginning and ending times.
  4. Do not interfere with another users experiment. If you need equipment being used, talk to the user. If you have questions about an unattended experiment, ask Microfab staff.
  5. Treat other peoples equipment and experiments as you want them to treat yours.
  6. Tools useage.
    1. Using the available tools is a privilege, use them gently.
    2. The tools are a shared and ESSENTIAL resource, return them promptly to their proper location when you are finished with them.
    3. Report damaged tools to Microfab staff so they can be repaired or replaced.


Emergency Procedures


These procedures are required to be read and understood by all course students, researchers, and staff. 
If there is a serious accident that requires immediate medical attention, call the campus police at 5-2677. Never move or lift an accident victim unless they are in imminent danger of further injury. If the victim is in danger of further injury, evalutate the nature of the injury first (look for spills, gas leaks, sparking, etc.) and if safe, grasp their feet and drag them away while protecting their head. 

Problems Requiring Immediate Attention

  1. Chemical splash on the skin or in the eye:
    1. Immediately begin flushing the affected area with plenty of water.
    2. Remove any contaminated clothing as you continue the rinsing process.
    3. Prompt medical attention should be sought after the initial aid is provided
    4. Rinse for 15 minutes for most acids/bases and 20 minutes for hydrofluoric acid.
    5. Request medical attention and inform the Microfab staff.
    6. Fill out an incident report.
    7. Emergency Showers / Eye Wash Stations
      1. If harmful chemicals come into contact with your skin, the prompt use of showers / eye washes can substantially reduce the possibility of serious injury.
      2. There are emergency showers / eye washes located in each of the Microfab processing bays. Make certain you know the location of the nearest emergency shower / eye wash station to your work area.
  2. BOE or HF on skin (Buffered Oxide Etch contains HF, hydrofluoric acid.)
    1. Downloadable HF Exposure Procedures
    2. Flush with copious amounts of water. DO NOT TOUCH THE VICTIM WITHOUT WEARING APPROPRIATE PROTECTIVE CLOTHING.
    3. Call U. of Utah Poison Control Center, 581-2151
    4. Apply Calcium Glucenate gel to the affected area (except for eyes)
    5. Transport victim to the Emergency Room at the University of Utah Hospital.
  3. Poisonous Gas Inhalation
    1. Remove the victim from the contaminated environment if possible to do safely. A self-contained breathing apparatus (SCBA) is located near the lab entrance.
    2. Call U. of Utah Poison Control Center, 581-2151
    3. Summon emergency medical personnel.
    4. Loosen their clothing to facilitate breathing.
    5. If the victim has stopped breathing, use CPR (if qualified).
    6. Request medical attention and inform the Microfab staff.
  4. Ingested Poisons
    1. Call U. of Utah Poison Control Center, 581-2151
    2. Follow directions on the MSDS. If there are no directions, then dilute strong acids and bases with large amounts of water.
  5. Electrical Shock
    1. Evaluate source of shock and remove the source of the shock if possible.
    2. Request medical attention and inform the Microfab staff.
    3. Administer CPR if necessary and trained to do so.
  6. Fire
    1. Location of Fire Alarms. Familiarize yourself with the location of all fire alarms, fire extinguishers, and emergency exits in or near the Microfab Lab.
    2. Clothing on Fire
      1. Roll the victim on the ground to smother the fire or if easily available, use safety shower to extinguish the flame.
      2. Summon medical help by dialing Campus Police at 5-2677
      3. Notify the Microfab staff.
    3. Controllable Fire
      1. The Microfab facility is equipped with Halon fire extinguishers. Make certain you are familiar with the location in your work area.
      2. Turn off electricity for electrical fires.
      3. Use the nearest fire extinguisher aimed at the base of the flame using a sweeping motion.
      4. Report the fire to Microfab staff.
      5. Call Campus Police at 5-2677 if necessary
    4. Uncontrollable Fire or Explosion
      1. Alert people in the lab to evacuate.
      2. Pull nearest fire alarm.
      3. Assist injured people.
      4. Close doors to isolate the fire.
      5. Report fire to Microfab staff.
      6. Silane (SiH4) fires can only be extinguished by turning off the gas at the source.
      7. Call Campus Police at 5-2677 as soon as possible.

General Problems

  1. Chemical spills
    1. Major Spill
      1. Evacuate laboratory.
      2. Attend to injured people
      3. If spill is flammable, turn off sources of heat.
      4. Seal off affected areas.
      5. Call EH&S to report spill (1-6950), request HAZ-MAT team.
        After hours call Campus Police at 5-2677.
      6. Notify Microfab staff.
    2. Minor Spill (One that can be dealt with by laboratory staff without outside assistance.)
      1. Alert people in the area.
      2. Wear protective clothing.
      3. Avoid breathing vapors.
      4. Use appropriate spill kit for the material to be neutralized (i.e. Acid, Base, or Organic)
      5. Absorb the spill using the spill pillows located in the safety area near lab entrance and photolithography bays.
      6. Notify a Microfab staff member.
    3. Mercury Spill
      1. Alert people in area.
      2. Evacuate the area.
      3. Notify Microfab staff. EH&S should be summoned immediately.
  2. Injury
    1. Cuts and puncture wounds.
      1. Control bleeding by applying direct pressure.
      2. Seek medical help.
      3. Notify Microfab staff.
    2. Thermal burns:
      1. Major (second and third degree): This is a burn with blisters or charring that penetrates the skin. Also, first degree burns over large areas:
        1. Summon emergency medical help by calling Campus Police at 5-2677
        2. DO NOT cover the wound with either a dressing or a bandage!
        3. Notify Microfab staff.
      2. Minor (first and second degree): This is a burn that is red or results in minor blistering of the skin. A Minor burn only covers a small area of the body.
        1. Run cold water over the burn.
        2. Use a burn cream and cover with a sterile dressing.
        3. If necessary seek medical help.
    3. Major Injury from explosion, fall, etc. (including minor injuries that cause shock or unconsciousness)
      1. Initiate life saving measures if required. For severe bleeding apply direct pressure.
      2. Call Campus Police at 5-2677
      3. Do not move the victim unless there is immediate danger of further harm AND it is safe to approach them.
      4. If the victim stops breathing, immediately obtain assistance from someone who knows CPR.
      5. Remain with the person until medical help arrives.
      6. Notify Microfab staff.
  3. Power Failure:
    1. Turn off the equipment to prevent further damage.
    2. Completely close all hoods to help contain fumes
    3. Report the power failure to Microfab staff
  4. Building Problems: (i.e water leaks, gas leaks, electrical or lighting problems) and problems with liquid nitrogen, gaseous nitrogen, deionized water, fresh air flow, heating/air conditioning, exhaust air, plumbing
    1. Shut off source of problem if able.
    2. Report problem to Microfab staff for immediate attention
  5. Alarms systems in the Microfab lab:
    1. Fire
    2. Toxic gas monitor
    3. Burn box
    4. Furnace over temperature
    5. Timers

Safety Procedures


These procedures are required to be read and understood by all course students, researchers, and staff. 

Clothing Procedures

Everyone entering the Microfab Research Facility must enter through the lab coat storage area. Leave coats, backpacks, and personal items in the shelving locate at the main entrance to the lab. In order to proceed further into the laboratory, the user must follow the following guidelines. 

  1. General clothing requirements for basic protection against spills, and to protect the lab from your contamination:
    1. Lab coats are required for all areas. White coats are to be used by research personnel using the lab. Dark blue coats are for students is enrolled lab courses. Light blue labcoats are for Microfab staff.
    2. Shoes must cover feet- NO SANDALS!
    3. Use the shoe brush in the gowning when entering the lab.
    4. Legs must be fully covered- NO SHORTS OR SKIRTS!
    5. Safety glasses or goggles.
    6. Gloves
      1. Limited glove compatibility information is including in the links at the bottom of this page.
      2. Blue (Nitrile) and Yellow (Latex) gloves are available in the Microfab Lab, and each has specific circumstances for use.
      3. Blue (Nitrile) gloves are used ONLY for non-chemcial operations.
        1. Typical uses include working on vacuum systems, protecting substrates from contamination, operating microscopes, operating equipment.
        2. Because these gloves don't get contaminated with chemicals, you are permitted to operated door handles and lab equipment with these gloves.
      4. Yellow (Latex) gloves are to be used for all chemical operations.
        1. Latex gloves do NOT protect against all chemicals so additional gloves might need to be worn over the latex gloves for protection.
        2. Typical chemical operations are mixing acid solutions (except HF), using KOH, using etchants, using organic solvents or chemicals, etc.
        3. NEVER operate door handles or equipment while wearing yellow gloves. Residual chemicals on the gloves can contaminate surfaces and cause serious injury to future users.
      5. You MUST wear gloves at all times in Microfab processing bays.
      6. Never touch your face, nose, mouth, etc. while wearing gloves in Microfab. This contaminates you and the gloves! Gloves are meant to protect you AND the samples and equipment you work with from contamination.
      7. Do NOT operate door handles, use equipment, or leave the chemical processing area wearing gloves used while working with chemicals. This is a VERY important precaution needed to prevent contaminating/injuring someone else due to the chemicals on your gloves!
      8. Use the proper type of gloves for the activity. The proper type of glove will be listed in the SOP for the process.
      9. Thoroughly rinse and clean non-disposable acid gloves when you are finished with them, and remove them by gripping and pulling on the fingers. Do not use a contaminated glove to grip the inside of the other glove during removal or at any other time!
      10. Note: Some people are allergic to latex. Summon medical help (Campus Police 5-2677) if a severe allergic reaction occurs.
  2. Clean room access requires further gowning.
    1. First put on foot booties and then only proceed onto the clean room mat.
    2. Use a bouffant to cover hair and facial hair.
    3. When leaving the clean room, remove the booties and bouffant cap before leaving the gowning bay. These items should not leave the clean room gowning area. A storage rack is located in the clean gowning are to enable limited (10 uses, or until booties show particles) re-use of these for economic reasons.
  3. Specialty Clothing
    1. Acid/base resistant aprons, face shields, and general purpose goggles are available. These items should be worn for processing requiring the use of wet chemicals.
    2. Specialty glovesshould be worn as appropriate over the PVC gloves when handling chemicals.

Laboratory Safety Equipment and Alarms


Chemical Handling Procedures

  1. Storage
    1. Chemicals are stored in separate chemical cabinets depending on the nature of the chemical: Solvents are stored together. Acids are stored together and mineral acids (hydrochloric, nitric, etc) must be physically separated from organic acids (acetic, oxalic, etc). Bases are stored together. Salts are stored together. (Violent reactions can occur if acids/solvents or acits/bases are mixed carelessly)
    2. You may not store chemicals in dry boxes, on benches or tables. All chemicals must be stored in an authorized containment vessel.
    3. All chemical containers MUST be clearly labeled (including waste containers). Include the name of the responsible user and the date of mixing. Use a "Sharpie" pen to mark glassware. This can be cleaned with methanol or acetone.
  2. Transport
    1. All chemicals must be transported using either a chemical cart or a bottle carrier. Short moves within the work area should have the attention of both hands in appropriate gloves.
    2. Bottle carriers are for transport of chemicals and not for storage.
    3. Specialty chemicals can be moved into and out of the Microfab facilities with authorization of the Microfab staff.
  3. Chemical Usage
    1. Always wear complete safety apparel when handling chemicals - follow instructions. Some chemicals dissolve PVC gloves. It is in your best interest to know which ones - read the MSDS for all chemicals before using.
    2. Do not taste, smell or touch any chemical, vapor or gas.
    3. Never mix acids and solvents (fires can result or KABOOM)
    4. Never mix acids and cyanide based chemicals (such as plating solutions). This mixture will produce an extremely deadly gas known as hydrogen cyanide.
    5. Keep solvents and acids/bases in separate workspace. Dispose separately.
    6. Use chemicals in well-ventilated areas designed for chemical processing (e.g. wet hoods).
    7. Do not heat, mix or prepare chemicals without authorized procedures or prior experience.
    8. When using hazardous materials, never work alone.
    9. Always add acid to water. Never add water to acid. The risk of acid splashing out of the container or generating a violent reaction is very high.
    10. Treat all containers / spills of unknown origin as hazardous. Use pH paper to help identify an unknown material.
    11. Never touch any equipment or door handles while wearing specialty chemical gloves. This is a required safety courtesy to others and will protect yourself as well.
    12. Do not leave hazardous materials / processing chemicals in glassware when in use. If this is unavoidable, the materials(s) must be labeled for proper identification.
    13. All minor chemical spills (drips and splashes) are to be wiped up using DI water dampened wipers immediately after they occur. Solvent spills can be cleaned up with an isopropyl (IPA) dampened wiper. Any larger spill is to be cleaned up with the assistance of a Microfab staff member.
    14. All beakers, graduated cylinders, etc. must be emptied, rinsed and stored properly at the end of each use. Rinse out acid, base and oxidizer bottles a minimum of three (3) times with DI water.
    15. Specialty chemicals must be provided by individual users. Material Safety Data Sheets must be provided to the Microfab staff prior to using the chemicals in the Microfab Lab.
    16. When you are finished, please make sure to keep the front 12 inches of the chemical hood free of bottles, glassware, etc. Clean up your mess!!!
    17. Dispose of waste glassware in a cardboard box and tape it shut. Label "Waste Glass" on the outside of the box and place in the trash.
    18. All sharp objects (e.g. broken glass, needles, blades, etc.) must be placed in the designated "Sharps" waste container. Do not put any chemical waste in the Sharps waste container.
  4. MSDS (Material Safety Data Sheets)
    1. You should be familiar with the handling precautions and contact risks associated with the use of any chemical your will be dealing with.
    2. MSDS are the most important safety related document in the laboratory. The MSDS are available for all chemicals used in the lab. If new or specialty chemicals are required for your research, a MSDS must be provided to the Microfab staff for inclusion in the MSDS library. The MSDS library is kept available to users at the sign-in station.
    3. MSDS Sheets include descriptions of the materials ingredients and hazards. Become familiar with the MSDS sheets for all materials you work with. Know the hazards associated with your chemicals and treat them appropriately. Make a note in your notebook when you have reviewed the MSDS sheet, and review the sheets at least yearly.
  5. Waste Treatment Procedures
    1. Disposal of Acids and Bases
      1. All of the wet chemical hoods located in Microfab are plumbed to a central neutralization tank. Acids and bases can be poured down into the sink for disposal (but not at the same time). Always run water before, during, and after disposal of acid or base to insure adequate dilution and rinsing. Non-treated public water can be used for this purpose
      2. Rinse out empty acid bottles a minimum of three (3) times. When finished, label the bottles "rinsed" with a sharpie.
    2. Disposal of Organic Compounds (Solvents)
      1. NEVER dump solvents down the drain. The drains are connected to an acid / base neutralization system, and reactions of unknown intensity can occur.
      2. Solvent waste can be disposed by pouring the collected waste in the waste storage containers in the wet chemical processing area. Please remember to replace the lid on the waste solvent container.
    3. Disposal of Contaminated Solid Waste
      1. If possible, do not discard the waste fully saturated. Allow residual organics to evaporate under a vented hood. Dilute residual acids / bases by using rinse water prior to disposal.
      2. Photoresist contaminated glass and plastic pipettes are collected in a specific containment vessel located by the spin station.

Cryogenic Handling Procedures

All liquid nitrogen containers must be approved by the Microfab staff. Always wear close-toed shoes, long trousers, cryo gloves and goggles when you transfer LN2. Never touch any of the transfer assembly with your bare hands. 

  1. Open Vessels: When filling open dewars be aware of the level in the vessel. A special fixture is available for this operation.
  2. Sealed Containers: Follow appropriate procedures for the specific container being used.
  3. Precautions
    1. The large volume of gas produced from evaporation of a liquid can displace sufficient oxygen in a closed room to be dangerous (nitrogen asphyxiation). Ensure you have adequate ventilation for any operation consuming or transferring liquid nitrogen or helium.
    2. Do not spill on the floor. Repeated spills will cause accelerated mechanical damage to concrete, etc.

Compressed Gas Handling Procedures

  1. The Environmental Health and Safety (EH&S) website contains the University compressed gas standards.
  2. Cylinder Transport and Storage
    1. Do not bring new gases into Microfab without approval of the Safety Officer.
    2. Handle cylinders of compressed gases as high-energy sources and therefore as potential explosives.
    3. When storing or moving cylinders, have the protective caps securely in place to protect the valve stems.
    4. When moving large cylinders, strap them to a properly designed, wheeled cart to ensure stability
    5. Cylinders must not be dragged or rolled. Cylinders should not lean on one another.
    6. Restrain cylinders of all sizes, empty or full, individually by straps, chains, or a suitable stand to prevent them from falling.
    7. Do not expose cylinders to temperatures higher than approximately 50 C. Some small cylinders, such as lecture bottles, are not fitted with rupture devices and may explode if exposed to high temperatures.
    8. Cylinders should be stored in appropriately ventilated closets or in an open storage area. Store gases according to chemical compatibility .
    9. Never store a cylinder next to a heat or flame source.
    10. Do not place gas cylinders such that there is contact with electrical circuitry.
  3. Cylinder Use
    1. Never use cylinders that cannot be identified positively.
    2. Inspect cylinder valves for damage or corrosion prior to use. If unsuitable for use, return to supplier
    3. Never lubricate or modify the cylinder valves.
    4. Do not put oil or grease on the high pressure side of any oxygen, chlorine or other oxidizing agent cylinder valve. A fire or explosion can result
    5. Use the appropriate regulator on each gas cylinder. The threads on the regulators are designed to avoid improper use. Do not use any adapter between the gas cylinder and the regulator.
    6. Use toxic, flammable, corrosive, or reactive gases in fume hoods only. Post signs in the laboratory area when using any of these type gases.
    7. Never bleed cylinders completely empty. Leave a slightly positive pressure (30 psi) to keep contaminants out. (Never heat a compressed gas cylinder to "milk" out the last bit of gas. The base plug softens and it becomes a missile.)
    8. Remove the regulator from an empty cylinder and replace the protective cap. Mark the cylinder "empty" and place it in the appropriate location for pickup. Notify Microfab Staff.
    9. Do not mix gases within a cylinder. If a mixture is required, order it that way from the supplier.
    10. Never open a cylinder more than 1/2 to 3/4 of 1 turn. This way the cylinder can be turned off quickly in the event of an emergency.
    11. Review the MSDS sheets for the gasses that you are using. Many of the gasses are toxic. All high pressure gasses, regardless of toxicity, should be treated with respect.
    12. Before using any gas on any piece of equipment, verify that the gas that you think is connected is the one that actually is connected.
  4. Compressed Gas Safety
    1. Always wear safety glasses when handling compressed gases.
    2. Make sure all cylinders are properly labeled.
    3. Never direct high pressure gases at a person
    4. Regulators, gauges, and hoses should not be interchanged among gases.
    5. Do not place any item on top of a cylinder that could damage a safety device or interfere with quick closing of a valve.

Dangerous Light Sources: Lasers, ultraviolet lamps

  1. Safe Operation
    1. Avoid looking directly into the beam of light
    2. Avoid overexposure to the light
    3. Wear safety glasses with UV filtering during use of the equipment listed below
  2. Light Sources
    1. UV Source on Mask Aligners, Pattern Generators
    2. Filament of Electron Beam Evaporator
    3. Exposure lamp for mask fabrication
    4. Laser on laser ablation and marking tools
    5. Light from an Ar plasma in sputter deposition and ion etch tools