Equipment Information
PATTERN GENERATION
Electromask SOP
Electromask Maintenance
Criss-Cross Instructions
L-Edit Beginner's Guide
L-Edit Student Version
Nanofilm Mask Specifications
5206 Photoresist Reversal Procedure
PHOTOLITHOGRAPHY
Aligners
Spinners
Hot Plates and Ovens
Shipley 1813 Photoresist Application Procedure
THIN FILM DEPOSITION AND ETCH
Sputter Deposition Systems
Evaporation Deposition Systems
Furnace Deposition Systems
Dry Etch Systems
Wet Benches
STI Semitool ST-260 Spin Rinse Dry
TEST AND MEASUREMENT
Probe Stations
Optical Microscopes
Thin Film Thickness, Roughness, and Resistivity Equipment
Dektak Surface Profiler/Film Thickness Measurement
FEI Quanta SEM
ASSEMBLY, PACKAGING, AND LASER SCRIBING
Disco Wafer Dicing Saw SOP
Disco Silicon Dicing Blade Datasheet
Disco Glass Dicing Blade Datasheet
MEI Wirebonder/Wedgebonder SOP
Micron Laser SOP
Micron Nd:YAG Laser Maintenance
Optec KrF Micromaster Excimer Laser SOP
Blue M 1200 C Box Furnace SOP
PROCESSING AND DEVICE FABRICATION INFORMATION
Metal Gate CMOS Fabrication
SU8 and PDMS Soft Lithography
PDMS Bonding to Glass Procedure
Drilling Holes in Glass Slides
Glass Cutting/Glass Scribing and Breaking
S1813 Photoresist Liftoff SOP
AZ nLOF 2020 Liftoff Negative Photoresist SOP
Table of Thin Film Chemical Etchants
MATERIALS AND PROCESS INFORMATION AND DATA SHEETS
MIT Material Properties Database
Thickness Color Chart for Thermal Silicon Dioxide
Thickness Color Chart for LPCVD Silicon Nitride
Shipley 1813 Positive Photoresist Datasheet
SU-8 2025 Negative Photoresist Datasheet
SU-8 2100 Negative Photoresist Datasheet
AZ 4620 Thick Positive Photoresist Datasheet
Wavelengths of g, h, and i-lines
AZ 400k Inorganic Photoresist Developer Datasheet
AZ 400T Photoresist Stripper Datasheet
St. Gobain Boron Nitride Diffusion Sources
St. Gobain Phosphorous Diffusion Sources
Kirt Williams Etch Rates Part II
Angstrom Sciences Sputter Target Care and Cleaning Recommendations
Wirebonding Information
Equipment Log Sheets
PDMS Information
INFRASTRUCTURE/EQUIPMENT SUPPORT
Routine Maintenance and Chemical Stocks
Vacuum Pump Maintenance
DI Water System
MST Hazardous Gas Monitoring System Information
Ecosys Burn Box
Material Safety Data Sheets