| Tool | Tool Owner |
| Lithography | Brian Baker
|
| Pattern Generation | Brian Baker
|
| Thin Film Deposition | Brian Baker
|
| Furnaces and LPCVD | Tony Olsen
|
| Metrology | Tony Olsen
|
| Etching Systems | Charles Fisher
|
| Laser Micromachining | Charles Fisher
|
| Backend Processing | Brian Baker
|
| Testing and Characterization | Brian Baker
|
| Affiliated Laboratories | Ian Harvey
|
| Supporting Equipment | Brian Baker
|
| Supplies | Brian Baker
|
