The University of Utah Micro and Nano Fabrication at the University of Utah
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Microfabrication Equipment

 

Tool Tool Owner
Lithography

Brian Baker
 

Pattern Generation

Brian Baker
 

Thin Film Deposition

Brian Baker
 

Furnaces and LPCVD

Tony Olsen
 

Metrology

Tony Olsen
 

Etching Systems

Charles Fisher
 

Laser Micromachining

Charles Fisher
 

Backend Processing

Brian Baker
Charles Fisher

Testing and Characterization

Brian Baker
 

Affiliated Laboratories

Ian Harvey
 

Supporting Equipment

Brian Baker
 

Supplies

Brian Baker
 

 

Surface Analysis and nano Imaging Instruments

 

Tool Tool Owner
Surface & nano Imaging

Brian van Devener
 

Kratos AxisUltraDLD

Brian van Devener
 

Zygo NewView 5032

Brian van Devener
 

Woollam V-Vase Ellipsometer

Brian van Devener
 

FEI Quanta 600 FEG

Brian van Devener
 

Digital Instruments Dimension 3000

Brian van Devener
 

Reichert Polyvar Met

Brian van Devener
 

Tencor P-10

Brian van Devener
 

EDAX Eagle II microspot XRF

Brian van Devener
 

Related Characterization Resources

Brian van Devener

 

 
 
 
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