| Tool | Tool Owner |
| Lithography | Brian Baker |
| Pattern Generation | Brian Baker |
| Thin Film Deposition | Brian Baker |
| Furnaces and LPCVD | Tony Olsen |
| Metrology | Tony Olsen |
| Etching Systems | Charles Fisher |
| Laser Micromachining | Charles Fisher |
| Backend Processing | Brian Baker |
| Testing and Characterization | Brian Baker |
| Affiliated Laboratories | Ian Harvey |
| Supporting Equipment | Brian Baker |
| Supplies | Brian Baker |