1. Lithography
Mask Aligners
- Suss MicroTec MA 1006
- Front and backside mask aligner
- Electronic Visions EV-420
- Front and backside mask aligner
- OAI-206 Mask aligners (2)
- Kasper Instruments mask aligner
Spinners
- Solitec 5100 spinner
- Cee Instruments 100 programmable spinner
- Headway Research Inc. spinners (3)
Photoresist Primer
- YES LPIII HMDS vapor prime system
Photoresist Bake/Cure
- Lindberg BlueM curing oven
- Dataplate programmable digital hot plates
- EMS Precision hot plates
Photoresist Descum/Ashing
- Technics PEII-A
Lithography Chemicals
- Shipley 1813 positive photoresist
- AZ 4620 positive photoresist
- ICT3 negative photoresist
- SU8 photoresist
- HMDS
- Shipley 352 developer
- AZ 400K developer
- SU8 developer
- AZ Kwik Strip photoresist stripper