Microfabrication Lab-based Courses
ME EN 2960 Foundations of Microsystems
A “hands-on” introduction to the world of micro and nanosystems for engineering students. Students understand the wealth of existing applications and future inventive possibilities at the micrometer and nanometer scale. Laboratory exercises consist of dissection of IPOD MP3 players, building solar cells, and sensor design. Students introduced to Bottom-up (Atomic building blocks) and Top-down (Lithography, Deposition) approach to micro and nanotechnology. Visualization by Scanning Electron Microscopy.
ECE 5211 / MSE 5211 Semiconductor Device Physics Laboratory I
Hands-on experience in the fabrication of silicon devices. Use of oxidation, donor and acceptor diffusion, and high resolution photolithography in a clean room facility. Characterization of silicon, measurement of basic parameters, oxide thickness, dopant diffusion. Introduction to metallization and contacts.
ECE 5212 / MSE 5212 Semiconductor Device Physics Laboratory II
Integrated knowledge of individual processing steps with more complex processing equipment. Fabricate and characterize simple transistors and integrated circuits.
ECE 5221 / ME EN 5050 Fundamentals of Micromachining Processes
Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques.
ECE 5961 Practical Scanning Electron Microscopy
Cross listed with PHYS 5739 and MetE 7910
Students learn multiple advanced microscopy applications using state-of-the art imaging tools and analytical peripherals (EDS, EBSD, XRF).
ECE 5962 Thin Film Deposition
Science and technology of thin film deposition and characterization. Topics include characterization techniques used for measuring thin film properties, physical vapor deposition (PVD), and chemical vapor deposition (CVD). Application of deposition hardware, substrate preparation, and vacuum science and technology.
ECE 6225 Microsystems Design and Characterization
Cross listed as MET E 6055, BIOEN 6423, ME EN 6055, CHFEN 6659
This course generalizes microsystems design considerations with practical emphasis on MEMS and IC characterization/physical analysis. Exposure to reverse engineering (SEM) and process optimization/ control (DOE, SPL, GR&R)
ECE 6231/7231 Microsensors and Actuators Lab
Design and simulation of microsensors and actuators, process design, packaging and assembly, characterization and testing of microsensors and actuators as well as reliability issues. Fabrication & characterization of fully functional microsensors or actuators.
ECE 6440 Integrated Optics and Optical Sensors
Design and testing of custom integrated optical circuits based upon a standardized waveguide fabrication process on silicon.
ECE 6962 Heterogeneous Microsytems Technologies
A student project course, in which students research or invent microscale devices and then design, simulate, fabricate, and characterize devices.
ECE 7960 Surface Chemistry & Analysis
Cross listed as CHEM 7780 and MET E 7910
Introduction to physics and chemistry of solid surfaces. The lab section of the course is designed to provide a working knowledge for the operation of the Kratos Axis Ultra XPS/AES/ISS surface analysis system